FEATURES
q
Quantum Efficiency of CCD chip
q
Extremely high UV, DUV and VUV
sensitivity
APPLICATIONS
q
Beam Diagnostics of Stepper
Excimer Lasers: F
2
(157 nm), ArF
(193 nm), KrF
(248 nm)
q
Development of UV optics
Spectral Response Characteristic of CCD chip*
The C8000 camera series employs an ultra high sensitive
back-thinned CCD sensor made by Hamamatsu. Espe-
cially in the UV, DUV and VUV wavelength ranges, the
C8000 series offers extremely high sensitivity never be-
fore realized by other scientific CCDs.
BT(Back-thinned)-CCD
DATA SHEET
100
200
300
400
500
600
700
800
900 1000 1100 1200
100
80
60
40
20
0
Wavelength (nm)
Quantum Efficiency (%)
Excimer Laser
F
2
ArF
KrF
Wavelength (nm)
157
193
248
Quantum
84
57
69
* Without sapphire window. The spectral response with sapphire
window is decrease by the transmittance.
(This is typical, not guaranteed. )
Efficiency(%)
(This is typical, not guaranteed. )
Without sapphire
window
With sapphire
window
34 **
42 **
55 **
C8000-20
Video Camera
**Calclated value
DIMENSIONAL OUTLINES (UNIT: mm)
Camera controller (approx. 5.0 kg)
SPECIFICATIONS
Imaging device
Back-thinned frame transfer CCD
Effective number of pixels
640 (H)
×
480 (V)
Cell size
14
µ
m (H)
×
14
µ
m (V)
Effective area
Full well capacity typ.
65,000 electrons
Readout noise (r.m.s.)
100 to 150 electrons
(Note: The following functions are not effective with RS-644 digital output)
Frame rate
RS-644 digital out and RS-170A out
RS-232C
Data output
8.96 mm(H)
×
6.72mm (V)
C-mount
Dynamic range*
30 frame/s
430 : 1
Cooling method
Non-cooling
Cooling temperature
Dark current
-
A/D converter
10bit
Exposure time
1/30 s
External control
Lens mount
Functions
±
2
285
±
2
23
±
1
74
±
2
7
±
2
200
±
1
262
±
1
333
MIN
MAX
-
0
POWER
C8000
CCD CAMERA CONTROLLER
REMOTE
GAIN
OFFSET
CONTRAST ENHANCEMENT
SETUP
OVER
NORM
VIDEO
LEVEL
SET UP
BG
RECUR
,D=8
4-M
3
±
2
160
±
0.5
4
±
1
66
±
0.5
8
±
0.5
18
±
0.5
32
±
1
40
±
1
40
±
1
90
±
1
75
±
0.5
37.5
±
3
6.3
C8000
CCD CAMERA
D=6
1-32UN C-mount
1/4-20UNC,D=8
Camera head (approx. 1.3 kg)
C8000-20
*Calculated from the ratio of the full well capacity and the readout noise.
Ambient storage/operating temperature
Power consumption
Ambient storage/operating humidity
70VA
70% max. (no condensation)
Typ number
Contrast enhancement
-
Homepage Address http://www.hamamatsu.com
5
Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers.
q
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
.
q
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications and external appearance are subject to change without notice..
© 2003 Hamamatsu Photonics K.K.
ISO 9001
Certificate: 09 105 79045
HAMAMATSU PHOTONICS K.K., Systems Division
812 Joko-cho, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:export@sys.hpk.co.jp
U.S.A. and Canada: Hamamatsu Photonic Systems: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-1116, Fax: (1)908-231-0852, E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658, E-mail: info@hamamatsu.de
,
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10, E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: info@hamamatsu.se
-
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Mois, 1/E 20020 Arese (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741, E-mail: info@hamamatsu.it
Cat. No. SICS1069E06
JUL/2003 HPK
Created in Japan (PDF)
Real time background subtruction
Recursive filter (2, 4, 8, 16, 32, 64 frame selectable)
q
q
-10 to +50°C / 0 to +40°C
q
q
q
PDF 
ZIP